Granted Patent
Utility
US 6,534,922 · App. 09/884,460
Plasma processing apparatus
Inventors:
Jyoti Kiron Bhardwaj, Leslie Michael Lea
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Jun 20, 2001
Inventors
Jyoti Kiron Bhardwaj
Leslie Michael Lea
Assignee (at issue)
Surface Technology Systems PLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.