Granted Patent
Utility
US 6,535,007 · App. 09/852,969
Component holder for testing devices and component holder system microlithography
Inventors:
Hermann Haas, Jens Lüpke
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: May 10, 2001
Inventors
Hermann Haas
Jens Lüpke
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.