Granted Patent
Utility
US 6,535,273 · App. 09/756,028
Microlithographic illumination system with depolarizer
Inventor:
Manfred Maul
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Jan 2, 2001
Inventor
Manfred Maul
Assignee (at issue)
Carl Zeiss Stiftung
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.