Granted Patent
Utility
US 6,535,274 · App. 09/945,363
Projection exposure device
Inventor:
Martin Antoni
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Aug 31, 2001
Inventor
Martin Antoni
Assignee (at issue)
Carl Zeiss Stiftung
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.