Granted Patent
Utility
US 6,535,531 · App. 10/006,913
Gas discharge laser with pulse multiplier
Inventors:
Scott T. Smith, Alexander I. Ershov, Rajasekhar Rao
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Nov 29, 2001
Inventors
Scott T. Smith
Alexander I. Ershov
Rajasekhar Rao
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.