Granted Patent
Utility
US 6,535,783 · App. 09/799,408
Method and apparatus for the integration of sensor data from a process tool in an advanced process control (APC) framework
Inventors:
Michael L. Miller, Scott Bushman
Patented Case
View Patent ↗
Granted: Mar 18, 2003
Filed: Mar 5, 2001
Inventors
Michael L. Miller
Scott Bushman
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.