Granted Patent
Utility
US 6,536,280 · App. 09/659,961
Thin film MEMS sensors employing electrical sensing and force feedback
Inventor:
L. Richard Carley
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: Sep 12, 2000
Inventor
L. Richard Carley
Assignee (at issue)
IC Mechanics, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.