Granted Patent
Utility
US 6,537,010 · App. 09/812,014
Wafer boat support and method for twin tower wafer boat loader
Inventors:
John M. Martin, Arthur W. Harrison, Allen D. Edwards
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: Mar 19, 2001
Inventors
John M. Martin
Arthur W. Harrison
Allen D. Edwards
Assignee (at issue)
Amtech Systems, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.