Granted Patent
Utility
US 6,537,134 · App. 09/682,662
Polishing pad comprising a filled translucent region
Inventor:
Kelly Newell
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: Oct 3, 2001
Inventor
Kelly Newell
Assignee (at issue)
Cabot Microelectronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.