Granted Patent
Utility
US 6,537,368 · App. 09/928,739
Ideal oxygen precipitating epitaxial silicon wafers and oxygen out-diffusion-less process therefor
Inventors:
Robert J. Falster, Marco Cornara, Daniela Gambaro, Massimiliano Olmo
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: Aug 13, 2001
Inventors
Robert J. Falster
Marco Cornara
Daniela Gambaro
Massimiliano Olmo
Assignee (at issue)
MEMC Electronic Materials S.P.A.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.