Granted Patent
Utility
US 6,537,622 · App. 09/848,375
Method of prevention of particle pollution in a pre-clean chamber
Inventors:
Chia-Ming Kuo, Chao Yuan Huang
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: May 4, 2001
Inventors
Chia-Ming Kuo
Chao Yuan Huang
Assignee (at issue)
Silicon Integrated Systems Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.