Granted Patent
Utility
US 6,537,655 · App. 09/859,094
Epitaxial silicon wafer with intrinsic gettering and a method for the preparation thereof
Inventors:
Gregory M. Wilson, Jon Rossi, Charles C. Yang
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: May 16, 2001
Inventors
Gregory M. Wilson
Jon Rossi
Charles C. Yang
Assignee (at issue)
MEMC Electronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.