Granted Patent
Utility
US 6,537,706 · App. 09/525,198
Method for making a photolithographic mask
Inventors:
Qing Ma, Jin-Ku Lee, Jun Zheng, Giang T. Dao
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: Mar 14, 2000
Inventors
Qing Ma
Jin-Ku Lee
Jun Zheng
Giang T. Dao
Assignee (at issue)
Intel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.