Granted Patent
Utility
US 6,537,708 · App. 09/773,122
Electrical critical dimension measurements on photomasks
Inventor:
David Chan
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: Jan 31, 2001
Inventor
David Chan
Assignee (at issue)
PHOTRONICS, INC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.