Granted Patent
Utility
US 6,538,737 · App. 10/003,513
High resolution etalon-grating spectrometer
Inventors:
Richard L. Sandstrom, Alexander I. Ershov, William N. Partlo, Igor V. Fomenkov, Daniel J. W. Brown
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: Oct 31, 2001
Inventors
Richard L. Sandstrom
Alexander I. Ershov
William N. Partlo
Igor V. Fomenkov
Daniel J. W. Brown
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.