Granted Patent
Utility
US 6,539,042 · App. 09/771,789
Ultra pure component purge system for gas discharge laser
Inventors:
Shahryar Rokni, Xiaojiang Pan, Eckehard D. Onkels
Patented Case
View Patent ↗
Granted: Mar 25, 2003
Filed: Jan 29, 2001
Inventors
Shahryar Rokni
Xiaojiang Pan
Eckehard D. Onkels
Assignee (at issue)
Cymer, LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.