Granted Patent
Utility
US 6,540,468 · App. 09/786,315
Device and method for handling individual wafers
Inventors:
Jakob Blattner, Reto Stibi
Patented Case
View Patent ↗
Granted: Apr 1, 2003
Filed: Apr 17, 2001
Inventors
Jakob Blattner
Reto Stibi
Assignee (at issue)
TEC-SEM AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.