Granted Patent
Utility
US 6,540,469 · App. 09/945,643
Substrate processing apparatus
Inventors:
Tatsuhisa Matsunaga, Kouichi Noto
Patented Case
View Patent ↗
Granted: Apr 1, 2003
Filed: Sep 5, 2001
Inventors
Tatsuhisa Matsunaga
Kouichi Noto
Assignee (at issue)
Hitachi Kokusai Electric Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.