Granted Patent
Utility
US 6,540,587 · App. 09/688,013
Infrared end-point detection system
Inventors:
Yehiel Gotkis, Rodney Kistler
Patented Case
View Patent ↗
Granted: Apr 1, 2003
Filed: Oct 13, 2000
Inventors
Yehiel Gotkis
Rodney Kistler
Assignee (at issue)
Lam Research Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.