Granted Patent
Utility
US 6,540,883 · App. 09/243,814
Magnetron sputtering source and method of use thereof
Inventors:
Pius Gruenenfelder, Hans Hirscher, Walter Haag, Walter Albertin
Patented Case
View Patent ↗
Granted: Apr 1, 2003
Filed: Feb 3, 1999
Inventors
Pius Gruenenfelder
Hans Hirscher
Walter Haag
Walter Albertin
Assignee (at issue)
Unaxis Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.