Granted Patent
Utility
US 6,541,391 · App. 09/797,356
Methods of cleaning surfaces of copper-containing materials, and methods of forming openings to copper-containing substrates
Inventors:
David M. Smith, Kevin J. Torek, Paul A. Morgan
Patented Case
View Patent ↗
Granted: Apr 1, 2003
Filed: Feb 28, 2001
Inventors
David M. Smith
Kevin J. Torek
Paul A. Morgan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.