IP Library Granted Patent US 6,544,034
Granted Patent Utility
US 6,544,034 · App. 09/938,318

Heat treatment equipment for object to be treated and its exhausting method

Inventor: Minoru Watanabe
Patented Case View Patent ↗
Granted: Apr 8, 2003 Filed: Aug 24, 2001
Inventor
Minoru Watanabe
Assignee (at issue)
OKI ELECTRIC INDUSTRY CO., LTD.

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Quick Facts
Patent No.
US 6,544,034
App. No.
09/938,318
Filed
2001-08-24
Granted
2003-04-08
Kind
B2