Granted Patent
Utility
US 6,544,482 · App. 09/525,221
Chamber cleaning mechanism
Inventor:
David Inori
Patented Case
View Patent ↗
Granted: Apr 8, 2003
Filed: Mar 14, 2000
Inventor
David Inori
Assignee (at issue)
ADVANCED TECHNOLOGY & MATERIALS CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.