Granted Patent
Utility
US 6,544,696 · App. 09/996,748
Embedded attenuated phase shift mask and method of making embedded attenuated phase shift mask
Inventors:
Russell Westerman, Christopher Constantine
Patented Case
View Patent ↗
Granted: Apr 8, 2003
Filed: Nov 30, 2001
Inventors
Russell Westerman
Christopher Constantine
Assignee (at issue)
Unaxis USA Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.