Granted Patent
Utility
US 6,544,859 · App. 10/003,130
Semiconductor processing methods and structures for determining alignment during semiconductor wafer processing
Inventors:
David Ziger, Edward Dension, Pierre Leroux
Patented Case
View Patent ↗
Granted: Apr 8, 2003
Filed: Nov 1, 2001
Inventors
David Ziger
Edward Dension
Pierre Leroux
Assignee (at issue)
KONINKLIJKE PHILIPS ELECTRONICS NV
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.