Granted Patent
Utility
US 6,544,860 · App. 09/519,310
Shallow trench isolation method for forming rounded bottom trench corners
Inventor:
Kailash Singh
Patented Case
View Patent ↗
Granted: Apr 8, 2003
Filed: Mar 6, 2000
Inventor
Kailash Singh
Assignee (at issue)
KONINKLIJKE PHILIPS ELECTRONICS NV
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.