Granted Patent
Utility
US 6,544,883 · App. 09/987,029
Method of manufacturing semiconductor device
Inventor:
Masahiko Ohuchi
Patented Case
View Patent ↗
Granted: Apr 8, 2003
Filed: Nov 13, 2001
Inventor
Masahiko Ohuchi
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.