Granted Patent
Utility
US 6,545,761 · App. 09/452,334
Embedded interferometer for reference-mirror calibration of interferometric microscope
Inventors:
David J. Aziz, Bryan Guenther
Patented Case
View Patent ↗
Granted: Apr 8, 2003
Filed: Nov 30, 1999
Inventors
David J. Aziz
Bryan Guenther
Assignee (at issue)
Veeco Instruments Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.