Granted Patent
Utility
US 6,545,808 · App. 09/403,678
Phase mask with spatially variable diffraction efficiency
Inventors:
Peter Ehbets, Michel Poirier, Zhihong Xu, Nadia Capolla
Patented Case
View Patent ↗
Granted: Apr 8, 2003
Filed: Feb 10, 2000
Inventors
Peter Ehbets
Michel Poirier
Zhihong Xu
Nadia Capolla
Assignees (at issue)
INSTITUT NATIONAL D'OPTIQUE
Stockeryale Canada Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.