Granted Patent
Utility
US 6,546,508 · App. 09/430,476
Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework
Inventors:
Thomas J. Sonderman, Elfido Coss, Jr., Qingsu Wang
Patented Case
View Patent ↗
Granted: Apr 8, 2003
Filed: Oct 29, 1999
Inventors
Thomas J. Sonderman
Elfido Coss, Jr.
Qingsu Wang
Assignee (at issue)
Advanced Micro Devices, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.