Granted Patent
Utility
US 6,546,804 · App. 09/733,944
Method of making a pressure sensor comprising a resonant beam structure
Inventors:
Goeran Stemme, Edvard Kaelvesten
Patented Case
View Patent ↗
Granted: Apr 15, 2003
Filed: Dec 12, 2000
Inventors
Goeran Stemme
Edvard Kaelvesten
Assignee (at issue)
Radi Medical Systems AB
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.