Granted Patent
Utility
US 6,547,409 · App. 09/759,792
Method and apparatus for illuminating projecting features on the surface of a semiconductor wafer
Inventors:
Cary S. Kiest, William F. LENZKE
Patented Case
View Patent ↗
Granted: Apr 15, 2003
Filed: Jan 12, 2001
Inventors
Cary S. Kiest
William F. LENZKE
Assignee (at issue)
Electroglas, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.