Granted Patent
Utility
US 6,547,510 · App. 09/072,097
Substrate transport apparatus with coaxial drive shafts and dual independent scara arms
Inventor:
David Beaulieu
Patented Case
View Patent ↗
Granted: Apr 15, 2003
Filed: May 4, 1998
Inventor
David Beaulieu
Assignee (at issue)
Brooks Automation GmbH
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.