Granted Patent
Utility
US 6,548,347 · App. 09/832,858
Method of forming minimally spaced word lines
Inventor:
Werner Juengling
Patented Case
View Patent ↗
Granted: Apr 15, 2003
Filed: Apr 12, 2001
Inventor
Werner Juengling
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.