Granted Patent
Utility
US 6,548,372 · App. 09/685,531
Forming sidewall oxide layers for trench isolation
Inventor:
Chandra Mouli
Patented Case
View Patent ↗
Granted: Apr 15, 2003
Filed: Oct 10, 2000
Inventor
Chandra Mouli
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.