Granted Patent
Utility
US 6,548,404 · App. 09/819,653
Method and apparatus for manufacturing semiconductor devices
Inventors:
Hideharu Itatani, Masayuki Tsuneda
Patented Case
View Patent ↗
Granted: Apr 15, 2003
Filed: Mar 29, 2001
Inventors
Hideharu Itatani
Masayuki Tsuneda
Assignee (at issue)
Hitachi Kokusai Electric Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.