Granted Patent
Utility
US 6,548,411 · App. 09/907,484
Apparatus and methods for processing a workpiece
Inventors:
Paul Z. Wirth, Steven L. Peace, Erik Lund
Patented Case
View Patent ↗
Granted: Apr 15, 2003
Filed: Jul 16, 2001
Inventors
Paul Z. Wirth
Steven L. Peace
Erik Lund
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.