Granted Patent
Utility
US 6,548,416 · App. 09/911,682
Plasma ashing process
Inventors:
Qingyuan Han, Ivan L. Berry, III, Palani Sakthivel, Carlo Waldfried
Patented Case
View Patent ↗
Granted: Apr 15, 2003
Filed: Jul 24, 2001
Inventors
Qingyuan Han
Ivan L. Berry, III
Palani Sakthivel
Carlo Waldfried
Assignee (at issue)
Axcelis Technologies, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.