Granted Patent
Utility
US 6,548,821 · App. 09/549,501
Method and apparatus for inspecting substrates
Inventors:
David Treves, Thomas A. O'Dell
Patented Case
View Patent ↗
Granted: Apr 15, 2003
Filed: Apr 14, 2000
Inventors
David Treves
Thomas A. O'Dell
Assignee (at issue)
Komag, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.