IP Library Granted Patent US 6,548,943
Granted Patent Utility
US 6,548,943 · App. 09/833,804

Method of producing thin-film bulk acoustic wave devices

Inventors: Jyrki Kaitila, Juha Ellä
Patented Case View Patent ↗
Granted: Apr 15, 2003 Filed: Apr 12, 2001
Inventors
Jyrki Kaitila
Juha Ellä
Assignee (at issue)
Nokia Mobile Phones Ltd.

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Quick Facts
Patent No.
US 6,548,943
App. No.
09/833,804
Filed
2001-04-12
Granted
2003-04-15
Kind
B2