Granted Patent
Utility
US 6,549,264 · App. 09/985,875
Extreme-UV lithography vacuum chamber zone seal
Inventors:
Steven J. Haney, Donald Joe Herron, Leonard E. Klebanoff, William C. Replogle
Patented Case
View Patent ↗
Granted: Apr 15, 2003
Filed: Nov 6, 2001
Inventors
Steven J. Haney
Donald Joe Herron
Leonard E. Klebanoff
William C. Replogle
Assignee (at issue)
EUV LLC.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.