Granted Patent
Utility
US 6,551,044 · App. 09/395,795
Bellows isolation for index platforms
Inventor:
Ronald R. Stevens
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Sep 14, 1999
Inventor
Ronald R. Stevens
Assignee (at issue)
ASM America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.