Granted Patent
Utility
US 6,551,893 · App. 09/994,547
Atomic layer deposition of capacitor dielectric
Inventors:
Lingyi A. Zheng, Er-Xuan Ping, Lyle Breiner, Trung T. Doan
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Nov 27, 2001
Inventors
Lingyi A. Zheng
Er-Xuan Ping
Lyle Breiner
Trung T. Doan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.