Granted Patent
Utility
US 6,551,925 · App. 09/916,429
Method of forming a trench isolation structure resistant to hot phosphoric acid by extending trench liner to shoulder portions
Inventors:
Souichirou Iguchi, Takayuki Watanabe, Junji Kiyono
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Jul 27, 2001
Inventors
Souichirou Iguchi
Takayuki Watanabe
Junji Kiyono
Assignee (at issue)
NEC Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.