IP Library Granted Patent US 6,551,948
Granted Patent Utility
US 6,551,948 · App. 09/867,699

Flash memory device and a fabrication process thereof, method of forming a dielectric film

Inventors: Tadahiro Ohmi, Shigetoshi Sugawa
Patented Case View Patent ↗
Granted: Apr 22, 2003 Filed: May 31, 2001
Inventors
Tadahiro Ohmi
Shigetoshi Sugawa
Assignee (at issue)
Tadahiro Ohmi

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Quick Facts
Patent No.
US 6,551,948
App. No.
09/867,699
Filed
2001-05-31
Granted
2003-04-22
Kind
B2