Granted Patent
Utility
US 6,552,209 · App. 10/179,818
Preparation of metal imino/amino complexes for metal oxide and metal nitride thin films
Inventors:
Xinjian Lei, John Anthony Thomas Norman
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Jun 24, 2002
Inventors
Xinjian Lei
John Anthony Thomas Norman
Assignee (at issue)
Air Products and Chemicals, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.