Granted Patent
Utility
US 6,552,328 · App. 09/510,357
Microsensor including a VCSEL and method for electro-mechanical coupling of microsensors
Inventors:
Andrew Berlin, Elmer S. Hung
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Feb 22, 2000
Inventors
Andrew Berlin
Elmer S. Hung
Assignee (at issue)
Xerox Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.