Granted Patent
Utility
US 6,552,385 · App. 09/756,082
DRAM memory capacitor having three-layer dielectric, and method for its production
Inventors:
Gerhard Beitel, Martin Franosch, Thomas Haneder, Gerrit Lange, Hans Reisinger, Herbert Schafer, Stephan Schlamminger, Hermann Wendt
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Jan 8, 2001
Inventors
Gerhard Beitel
Martin Franosch
Thomas Haneder
Gerrit Lange
Hans Reisinger
Herbert Schafer
Stephan Schlamminger
Hermann Wendt
Assignee (at issue)
Infineon Technologies AG
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.