Granted Patent
Utility
US 6,552,779 · App. 09/863,557
Flying image of a maskless exposure system
Inventor:
Wenhui Mei
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: May 23, 2001
Inventor
Wenhui Mei
Assignee (at issue)
Ball Semiconductor Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.