Granted Patent
Utility
US 6,552,806 · App. 09/497,567
Automated minimization of optical path difference and reference mirror focus in white-light interference microscope objective
Inventors:
Richard Swinford, David J. Aziz, Bryan Guenther, Paul R. Unruh
Patented Case
View Patent ↗
Granted: Apr 22, 2003
Filed: Feb 3, 2000
Inventors
Richard Swinford
David J. Aziz
Bryan Guenther
Paul R. Unruh
Assignee (at issue)
Veeco Instruments Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.